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PDF MPX10 Data sheet ( Hoja de datos )

Número de pieza MPX10
Descripción 10 kPa Uncompensated Silicon Pressure Sensors
Fabricantes Freescale Semiconductor 
Logotipo Freescale Semiconductor Logotipo



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Technical Data
10 kPa Uncompensated
Silicon Pressure Sensors
The MPX10 and MPXV10GC series devices are silicon piezoresistive
pressure sensors providing a very accurate and linear voltage output — directly
proportional to the applied pressure. These standard, low cost, uncompensated
sensors permit manufacturers to design and add their own external temperature
compensation and signal conditioning networks. Compensation techniques are
simplified because of the predictability of Freescale's single element strain gauge
design. Figure 1 shows a schematic of the internal circuitry on the stand-alone
pressure sensor chip.
Features
• Low Cost
• Patented Silicon Shear Stress Strain Gauge Design
• Ratiometric to Supply Voltage
• Easy to Use Chip Carrier Package Options
• Differential and Gauge Options
• Durable Epoxy Unibody Element or Thermoplastic (PPS) Surface Mount Package
Functional Description
• Air Movement Control
• Environmental Control Systems
• Level Indicators
• Leak Detection
• Medical Instrumentation
• Industrial Controls
• Pneumatic Control Systems
• Robotics
ORDERING INFORMATION(1)
Device Type
Options
Case No. Order Number
SMALL OUTLINE PACKAGE (MPXV10G SERIES)
Ported
Rails
482A MPXV10GC6U
Elements
Tape and Reel
482A MPXV10GC6T1
Rails
482C MPXV10GC7U
UNIBODY PACKAGE (MPX10 SERIES)
Basic
Differential
344 MPX10D
Element
Ported
Differential
344C MPX10DP
Elements
Gauge
344B MPX10GP
Gauge
344E MPX10GS
Device Marking
MPXV10G
MPXV10G
MPXV10G
MPX10D
MPX10DP
MPX10GP
MPX10D
1. MPX10 series pressure sensors are available in differential and gauge configurations.
Devices are available in the basic element package or with pressure port fittings which
provide printed circuit board mounting ease and barbed hose pressure connections.
UNIBODY PACKAGES
MPX10
Rev 12, 01/2007
MPX10
MPXV10GC
SERIES
UNCOMPENSATED PRESSURE
SENSOR
0 TO 10 kPA (0–1.45 psi)
35 mV FULL SCALE SPAN
(TYPICAL)
SMALL OUTLINE PACKAGES
MPXV10GC6U
CASE 482A-01
MPXV10GC7U
CASE 482C-03
SMALL OUTLINE PACKAGE
PIN NUMBERS
1 GND 5
N/C
2 +Vout 6
N/C
3 Vs 7 N/C
4 –Vout 8
N/C
NOTE: Pin 1 is noted by the notch in the lead.
UNIBODY PACKAGE PIN NUMBERS
1 GND 3
Vs
2 +Vout 4 –Vout
NOTE: Pin 1 is noted by the notch in the lead.
MPX10D
CASE 344-15
MPX10GP
CASE 344B-01
MPX10DP
CASE 344C-01
© Freescale Semiconductor, Inc., 2007. All rights reserved.
MPX10GS
CASE 344E-01

1 page




MPX10 pdf
Wire Bond
Silicone
Die Coat
Die
P1
Stainless Steel
Metal Cover
Epoxy
Case
Lead Frame
RTV Die
P2 Bond
Figure 4. Unibody Package — Cross-Sectional Diagram (Not to Scale)
Figure 4 illustrates the differential or gauge configuration
in the basic chip carrier (Case 344). A silicone gel isolates the
die surface and wire bonds from the environment, while
allowing the pressure signal to be transmitted to the silicon
diaphragm.
The MPX10 and MPXV10GC series pressure sensor
operating characteristics and internal reliability and
qualification tests are based on use of dry air as the pressure
media. Media other than dry air may have adverse effects on
sensor performance and long term reliability. Contact the
factory for information regarding media compatibility in your
application.
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Freescale designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing silicone gel which
isolates the die from the environment. The Freescale
pressure sensor is designed to operate with positive
differential pressure applied, P1 > P2.
The Pressure (P1) side may be identified by using the
following table.
Part Number
MPX10D
MPX10DP
MPX10GP
MPX10GS
MPXV10GC6U
Case Type
344
344C
344B
344E
482A
Pressure (P1) Side Identifier
Stainless Steep Cap
Side with Part Marking
Side with Port Attached
Side with Port Attached
Side with Part Marking
MPXV10GC7U
482C Side with Part Marking
Sensors
Freescale Semiconductor
MPX10
5

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